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The Cascade Microtech 12000-series probe systems allow you to access the full measurement range of your test instrumentation. Noise, leakage, stray capacitance and measurement settling times have been greatly reduced. Whatever the application: DC or RF device characterization, wafer-level reliability, e-test, modeling, or yield enhancement, the 12000-series probe stations assure best-in-the-world measurements.
EQUIPMENT CONFIGURATION & SPECIFICATIONS
Probe Station: Cascade Summit 12000-series semi-automatic, thermal wafer prober with MicroChamber(TM), FemtoGuard(TM), and AttoGuard(TM) shielding
Thermal Wafer Chuck: 8-inch/200mm Temptronic thermal, triaxial wafer chuck (Ni)
Thermal Controller: Temptronic TPO3000-2300-1; 115volts/60Hz/1Ph/20Amps
System Controller: 19-inch rack-mount computer; Windows(TM) XP operating system and Nucleus(TM) 2.7 prober control software.
Microscope: Mitutoyo FS-70 compound microscope with trinocular head, includes 10X eyepieces and (qty 1) Mitutoyo MPlan APO 20X objective lens. Additional microscope lenses are sold separately.
High-Stability Bridge Mount: X-Y travel = 25.4 x 25.4mm (1 x1-inch), Lift repeatability = 1u (0.04mil) typical, Tilt-back range = 2 to 3-inch (5.08-7.62cm), Weight supported = 70lb (max.)
Triaxial & Vacuum Connection Panels: 14x triaxial-to-triaxial connectors, 1x shorting link (Cascade p/n 116-643), vacuum connection panel with 10 vacuum ports (5 right, 5 left)
OPTIONAL ACCESSORIES (sold separately, please inquire about availability)
- Probe Positioners: We have a limited supply of RF and DC probe positioners in stock, please call for details.
- Additional Microscope Objective Lenses: Please inquire about additional objective lens magnifications in stock
- Vibration Isolation Table: Vib-Iso table as shown in photos is an optional accessory that is sold separately and subject to availability at the time of order. We have several different models in stock, please inquire.
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